During calibration, the deviation of the measured value from the actual pressure value is determined and can be corrected by appropriate control measures.

The calibration measurement data is recorded and documented together with the calibration certificate. Traceability to national standards is possible using this documentation.

A calibrated measuring cell can be used to check other measuring cells.

During testing/adjustment, the entire display range of the measuring sensor is checked to ensure that the error is within the manufacturer's tolerance specifications and confirmed with a test mark.

Measuring cells in process systems are necessary in order to carry out a safe and reproducible, controlled process in a vacuum. However, constant operation in the process chamber also leads to increasing contamination of the measuring sensor, which in turn has a noticeable effect on the measured value. Depending on the process and the resulting contamination, the sensor can now indicate too little pressure or too much pressure, both of which are detrimental to production:

• Measuring sensor indicates too low a pressure: Process steps are started at pressures that may be too high, resulting in increased rejects.
• Measuring sensor indicates a pressure that is too high: Process steps start significantly later than would be possible, unnecessarily increasing process times. In the worst case, the entire process stops after a maximum waiting time has elapsed.

Not 100%, as the pressure value provided by a measuring cell cannot be set precisely even by calibration. The calibration determines the deviation of the measuring cell from the actual measured value, the display can then be corrected by a suitable control unit (settings in the display unit of the measuring cell).

This depends on the process, the contamination that occurs and the error tolerance of the vacuum process. In general, the calibration of a measuring cell is repeated at least once a year.